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Preparation method of scanning electron microscope samples

来源:QMAXIS 日期:2020-03-20 08:49:00 浏览量:516
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1. Basic requirements for scanning electron microscope samples


Firstly, the conductivity is good, and the surface potential of the sample does not increase under repeated electron beam scanning, avoiding charge effects;


Secondly, samples with good thermal stability, high electron beam temperature, and poor thermal conductivity may drift during observation, and some heat sensitive materials may be damaged due to unstable images. Bubbles, cracks, and voids may appear at the observation site;


Then, the yield of Secondary electrons and backscattered electrons is high;


Simply put


1) Conductivity of the sample


2) Sample size


3) Cleaning and drying of samples


4) Fixation of powder samples


5) Preparation of tissue and inclusion samples


Due to the inclination of 70&deg during DBSD sample analysis; The sample preparation requirements for EBSD are higher, with a flat, clean surface and no residual stress; When absolute orientation data is required, the sample appearance coordinate system should be accurate, with dimensions of approximately 1-3CM or slightly smaller.


2. Sample preparation


1) Embedding of specimens


When to embed:


a) When looking at edge information


b) When the sample is too small or the shape is very irregular


There are two types of inlay:

金相镶嵌机

Hot embedding method: Firstly, it is necessary to ensure that the temperature at which thermosetting or thermoplastic deformation occurs does not cause changes in the microstructure of the embedded specimen. Hot inlay is usually recommended.


Cold embedding method: epoxy resin or acrylic resin


2) Cleaning of specimens


Sample contamination or SEM contamination can lead to poor image quality, so it is important to clean the sample. You can use ear balls to blow or place the sample in acetone or alcohol, and clean it with ultrasound for at least 10 seconds.

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3) Grinding and polishing of the sample

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